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provides little warning of its presence (odorless at low concentrations), manuals mandate the use of sensitive detectors in the installation area. mks astron 2l manual
To maintain cleaning efficiency, the transport tube connecting the ASTRON to the process chamber must be short and made of materials minimally reactive to fluorine radicals (to avoid losing the cleaning flux to the tube walls) MKS Instruments Industry Reputation Have a specific question about your MKS Astron 2L
: Requires water cooling with a minimum flow of 2.0 gpm during operation and 0.5 gpm during idle. mks astron 2l manual